IPE Seminar
Advanced Reconstruction of Dislocations in Mono-crystalline Wafer for X-ray Laminography
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Europe/Berlin
Description
Antonia Reinke will present the results of her master thesis in electrical engineering.
Dislocation networks in mono-crystalline wafer can be imaged using
diffraction tomography. Current reconstruction methods such as the
filtered back projection need a lot of projections and many artifacts
occur in the reconstruction due to the limited view and the high noise
in the projections. The aim of this work was to find iterative methods
which allow the use of fewer projections and provide a high quality
reconstruction. The DART, DC and SIRT algorithms were implemented and
tested for the laminographic geometry and evaluated on a simulated data
set and applied to measured data. Furthermore the computation was
accelerated on a GPU using OpenCL.