Advanced Reconstruction of Dislocations in Mono-crystalline Wafer for X-ray Laminography

by Antonia Reinke

Tuesday Jul 12, 2016, 12:00 PM → 1:00 PM Europe/Berlin

Antonia Reinke will present the results of her master thesis in electrical engineering. Dislocation networks in mono-crystalline wafer can be imaged using diffraction tomography. Current reconstruction methods such as the filtered back projection need a lot of projections and many artifacts occur in the reconstruction due to the limited view and the high noise in the projections. The aim of this work was to find iterative methods which allow the use of fewer projections and provide a high quality reconstruction. The DART, DC and SIRT algorithms were implemented and tested for the laminographic geometry and evaluated on a simulated data set and applied to measured data. Furthermore the computation was accelerated on a GPU using OpenCL.