Speaker
Dr
Mathias Wegner
(Karlsruhe Institute of Technology)
Description
The Competence Center for High-Resolution Superconducting Sensors (HSS) at the Karlsruhe Institute of Technology (KIT) provides a dedicated microfabrication infrastructure for the development and fabrication of superconducting quantum sensors and superconducting readout electronics. This poster provides an overview of the available fabrication equipment and its role within a future integrated process chain for the scalable, semi-automated microfabrication on wafer sizes up to 150 mm.
Author
Dr
Mathias Wegner
(Karlsruhe Institute of Technology)